國際半導(dǎo)體設(shè)備與材料組織（SEMI ）在2018年C3.57-0312中，對二氧化碳產(chǎn)品的純度要求要達(dá)到 99.999% 以上，雜質(zhì)限量在ppm級別。隨著集成電路行業(yè)的發(fā)展，我國新制定的國標(biāo)《GB/T43772-2024 電子氣體 二氧化碳》中對二氧化碳品的純度要求已達(dá)到 5N以上，對氣體雜質(zhì)要求達(dá)1~5ppm。
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本文件規(guī)定了二氧化碳的技術(shù)要求、采樣、試驗方法、檢驗規(guī)則、標(biāo)志、包裝、運輸、貯存及安全信息的要求。
本文件適用于由高純二氧化碳經(jīng)純化制備的電子用二氧化碳
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浩瀚色譜（山東）應(yīng)用技術(shù)開發(fā)有限公司，研制的《電子氣二氧化碳中總烴測定玻璃微球色譜柱?》柱效高，總烴峰型對稱，不分叉，面積外標(biāo)法定量，結(jié)果滿意。
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名稱：分離柱
固定相：硅烷化玻璃微球
規(guī)格：3m*3mm（內(nèi)徑）
粒度：0.18mm-0.25mm
型號：HH-BLWQ
材質(zhì)：不銹鋼
應(yīng)用：GB_T 43772-2024電子氣體二氧化碳
適用于安捷倫，島津，賽默飛，瓦里安，布魯克，PE，磐諾，北分瑞利，東西電子，天瑞，天美，科創(chuàng)
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According to the International Semiconductor Equipment and Materials Organization (SEMI) in C3.57-0312 of 2018, the purity requirement for carbon dioxide products must be above 99.999%, with impurity limits at the ppm level. With the development of the integrated circuit industry, the purity requirement for carbon dioxide products in China's newly formulated national standard "GB/T43772-2024 Electronic Gas Carbon Dioxide" has reached 5N or above, and the requirement for gas impurities is 1-5ppm.
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a glass microsphere chromatography column for the determination of total hydrocarbons in electronic gas carbon dioxide. The column has high column efficiency, symmetrical total hydrocarbon peak shapes, no branching, and can be quantified by area external standard method with satisfactory results.
Name: Separation Column
Fixed phase: Silanized glass microspheres
Specification: 3m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-BLWQ
Material: Stainless steel
Application: GB_T 43772-2024 Electronic Gas Carbon Dioxide
Suitable for Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE， Panno, Beifen Ruili, Dongxi Electronics, Tianrui, Tianmei, Sci Tech Innovation
滕州市浩瀚色譜儀器技術(shù)服務(wù)有限公司
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